Inventor
HORI TADASHI
JP30 patents
⚠️ This page may combine multiple inventors who share the name “HORI TADASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
28 patentsUS5720826AFeb 24, 1998
Photovoltaic element and fabrication process thereof
CANON KK132 citations98
US5589007ADec 31, 1996
Photovoltaic elements and process and apparatus for their formation
CANON KK112 citations98
US5968274AOct 19, 1999
Continuous forming method for functional deposited films and deposition apparatus
CANON KK46 citations96
US5468521ANov 21, 1995
Method for forming a photoelectric deposited film
CANON KK61 citations96
US5919310AJul 6, 1999
Continuously film-forming apparatus provided with improved gas gate means
CANON KK37 citations93
US5575855ANov 19, 1996
Apparatus for forming a deposited film
CANON KK36 citations93
US6653165B2Nov 25, 2003
Methods of forming semiconductor element, and semiconductor elements
CANON KK22 citations92
US6602347B1Aug 5, 2003
Apparatus and method for processing a substrate
CANON KK24 citations92
US6576061B1Jun 10, 2003
Apparatus and method for processing a substrate
CANON KK39 citations92
US6399411B1Jun 4, 2002
Method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic device
CANON KK35 citations92
US6261862B1Jul 17, 2001
Process for producing photovoltaic element
CANON KK31 citations92
US6162988ADec 19, 2000
Photovoltaic element
CANON KK18 citations92
US6159763ADec 12, 2000
Method and device for forming semiconductor thin film, and method and device for forming photovoltaic element
CANON KK39 citations92
US6159300ADec 12, 2000
Apparatus for forming non-single-crystal semiconductor thin film, method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic device
CANON KK23 citations92
US6153013ANov 28, 2000
Deposited-film-forming apparatus
CANON KK47 citations92
US5927994AJul 27, 1999
Method for manufacturing thin film
CANON KK38 citations92
US5897332AApr 27, 1999
Method for manufacturing photoelectric conversion element
CANON KK20 citations92
US5769963AJun 23, 1998
Photovoltaic device
CANON KK39 citations92
US6858087B2Feb 22, 2005
Vacuum-processing method using a movable cooling plate during processing
CANON KK15 citations84
US6547922B2Apr 15, 2003
Vacuum-processing apparatus using a movable cooling plate during processing
CANON KK13 citations84
US6447612B1Sep 10, 2002
Film-forming apparatus for forming a deposited film on a substrate, and vacuum-processing apparatus and method for vacuum-processing an object
CANON KK19 citations84
US6482668B2Nov 19, 2002
Process for producing photovoltaic device
CANON KK13 citations74
US6368944B1Apr 9, 2002
Method of manufacturing photovoltaic element and apparatus therefor
CANON KK6 citations74
US5946587AAug 31, 1999
Continuous forming method for functional deposited films
CANON KK12 citations74
US6877458B2Apr 12, 2005
Apparatus for forming deposited film
CANON KK2 citations63
US6530341B1Mar 11, 2003
Deposition apparatus for manufacturing thin film
CANON KK3 citations63
US7211708B2May 1, 2007
Exhaust processing method, plasma processing method and plasma processing apparatus
CANON KK2 citations62
US6833155B2Dec 21, 2004
Apparatus and method for processing a substrate
CANON KK1 citations52