Inventor
NISHIMOTO TOMONORI
JP11 patents
Patents
11 patentsUS5401330AMar 28, 1995
Photovoltaic element
CANON KK78 citations96
US6100466AAug 8, 2000
Method of forming microcrystalline silicon film, photovoltaic element, and method of producing same
CANON KK68 citations95
US6043427AMar 28, 2000
Photovoltaic device, photoelectric transducer and method of manufacturing same
CANON KK51 citations95
US7282132B2Oct 16, 2007
Zinc oxide film treatment method and method of manufacturing photovoltaic device utilizing the same
CANON KK24 citations92
US6488995B1Dec 3, 2002
Method of forming microcrystalline silicon film, method of fabricating photovoltaic cell using said method, and photovoltaic device fabricated thereby
CANON KK45 citations92
US6153013ANov 28, 2000
Deposited-film-forming apparatus
CANON KK47 citations92
US5927994AJul 27, 1999
Method for manufacturing thin film
CANON KK38 citations92
US5897332AApr 27, 1999
Method for manufacturing photoelectric conversion element
CANON KK20 citations92
US5769963AJun 23, 1998
Photovoltaic device
CANON KK39 citations92
US6530341B1Mar 11, 2003
Deposition apparatus for manufacturing thin film
CANON KK3 citations63
US6057005AMay 2, 2000
Method of forming semiconductor thin film
CANON KK6 citations62