Inventor
KOIKE HIDEMI
JP41 patents
⚠️ This page may combine multiple inventors who share the name “KOIKE HIDEMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
33 patentsUS6927391B2Aug 9, 2005
Method and apparatus for processing a micro sample
HITACHI LTD69 citations99
US6781125B2Aug 24, 2004
Method and apparatus for processing a micro sample
HITACHI LTD114 citations99
US6664552B2Dec 16, 2003
Method and apparatus for specimen fabrication
HITACHI LTD139 citations99
US6734687B1May 11, 2004
Apparatus for detecting defect in device and method of detecting defect
HITACHI LTD134 citations98
US6717156B2Apr 6, 2004
Beam as well as method and equipment for specimen fabrication
HITACHI LTD109 citations98
US6303932B1Oct 16, 2001
Method and its apparatus for detecting a secondary electron beam image and a method and its apparatus for processing by using focused charged particle beam
HITACHI LTD84 citations97
US7550750B2Jun 23, 2009
Method and apparatus for processing a micro sample
HITACHI LTD26 citations96
US7205560B2Apr 17, 2007
Method and apparatus for processing a micro sample
HITACHI LTD32 citations96
US7205554B2Apr 17, 2007
Method and apparatus for processing a micro sample
HITACHI LTD34 citations96
US6794663B2Sep 21, 2004
Method and apparatus for specimen fabrication
HITACHI LTD33 citations96
US5976328ANov 2, 1999
Pattern forming method using charged particle beam process and charged particle beam processing system
HITACHI LTD58 citations96
US5783830AJul 21, 1998
Sample evaluation/process observation system and method
HITACHI LTD85 citations95
US4543465ASep 24, 1985
Microwave plasma source having improved switching operation from plasma ignition phase to normal ion extraction phase
HITACHI LTD108 citations95
US7888639B2Feb 15, 2011
Method and apparatus for processing a micro sample
HITACHI LTD14 citations93
US7470918B2Dec 30, 2008
Method and apparatus for processing a micro sample
HITACHI LTD22 citations93
US7465945B2Dec 16, 2008
Method and apparatus for processing a micro sample
HITACHI LTD20 citations93
US6627889B2Sep 30, 2003
Apparatus and method for observing sample using electron beam
HITACHI LTD21 citations93
US5216253AJun 1, 1993
Ion implantation apparatus with variable width slits providing an ion beam of high purity
HITACHI LTD29 citations93
US7897936B2Mar 1, 2011
Method and apparatus for specimen fabrication
HITACHI LTD15 citations92
US7268356B2Sep 11, 2007
Method and apparatus for specimen fabrication
HITACHI LTD28 citations92
US6566654B1May 20, 2003
Inspection of circuit patterns for defects and analysis of defects using a charged particle beam
HITACHI LTD34 citations92
US6476387B1Nov 5, 2002
Method and apparatus for observing or processing and analyzing using a charged beam
HITACHI LTD44 citations92
US5053678AOct 1, 1991
Microwave ion source
HITACHI LTD48 citations92
US4801847AJan 31, 1989
Charged particle accelerator using quadrupole electrodes
HITACHI LTD26 citations92
US4658143AApr 14, 1987
Ion source
HITACHI LTD29 citations92
US4633138ADec 30, 1986
Ion implanter
HITACHI LTD43 citations92
US4433228AFeb 21, 1984
Microwave plasma source
HITACHI LTD43 citations92
US4409520AOct 11, 1983
Microwave discharge ion source
HITACHI LTD29 citations92
US4393333AJul 12, 1983
Microwave plasma ion source
HITACHI LTD38 citations90
US6344115B1Feb 5, 2002
Pattern forming method using charged particle beam process and charged particle beam processing system
HITACHI LTD8 citations74
US7301146B2Nov 27, 2007
Probe driving method, and probe apparatus
HITACHI LTD8 citations73
US4316090AFeb 16, 1982
Microwave plasma ion source
HITACHI LTD17 citations73
US4629930ADec 16, 1986
Plasma ion source
HITACHI LTD4 citations60