Inventor
ISAKOZAWA SHIGETO
JP40 patents
⚠️ This page may combine multiple inventors who share the name “ISAKOZAWA SHIGETO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
31 patentsUS6531697B1Mar 11, 2003
Method and apparatus for scanning transmission electron microscopy
HITACHI LTD59 citations96
US6051834AApr 18, 2000
Electron microscope
HITACHI LTD65 citations96
US5866905AFeb 2, 1999
Electron microscope
HITACHI LTD74 citations96
US4451737AMay 29, 1984
Electron beam control device for electron microscopes
HITACHI LTD72 citations96
US5783830AJul 21, 1998
Sample evaluation/process observation system and method
HITACHI LTD85 citations95
US5367171ANov 22, 1994
Electron microscope specimen holder
HITACHI LTD74 citations94
US6822233B2Nov 23, 2004
Method and apparatus for scanning transmission electron microscopy
HITACHI LTD31 citations92
US6794648B2Sep 21, 2004
Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method
HITACHI LTD19 citations92
US6703613B2Mar 9, 2004
Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method
HITACHI LTD28 citations92
US6566654B1May 20, 2003
Inspection of circuit patterns for defects and analysis of defects using a charged particle beam
HITACHI LTD34 citations92
US6150657ANov 21, 2000
Energy filter and electron microscope equipped with the energy filter
HITACHI LTD34 citations92
US5981948ANov 9, 1999
Transmission electron microscope and method of observing element distribution
HITACHI LTD21 citations92
US5552602ASep 3, 1996
Electron microscope
HITACHI LTD41 citations92
US7476872B2Jan 13, 2009
Method and apparatus for observing inside structures, and specimen holder
HITACHI LTD9 citations84
US7928376B2Apr 19, 2011
Element mapping unit, scanning transmission electron microscope, and element mapping method
HITACHI LTD15 citations83
US6933501B2Aug 23, 2005
Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method
HITACHI LTD10 citations74
US5717207AFeb 10, 1998
Transmission electron microscope with camera system
HITACHI LTD16 citations74
US5134289AJul 28, 1992
Field emission electron device which produces a constant beam current
HITACHI LTD7 citations74
US5013915AMay 7, 1991
Transmission type electron microscope
HITACHI LTD13 citations74
US4945247AJul 31, 1990
Field emission electron gun system
HITACHI LTD15 citations73
US4680469AJul 14, 1987
Focusing device for a television electron microscope
HITACHI LTD18 citations73
US4698503AOct 6, 1987
Focusing apparatus used in a transmission electron microscope
HITACHI LTD17 citations72
US4494000AJan 15, 1985
Image distortion-free, image rotation-free electron microscope
HITACHI LTD12 citations72
US4480220AOct 30, 1984
Electron energy analyzing apparatus
HITACHI LTD8 citations72
US5059859AOct 22, 1991
Charged particle beam generating apparatus of multi-stage acceleration type
HITACHI LTD19 citations71
US4950909AAug 21, 1990
Sample tilting device in electron microscope
HITACHI LTD11 citations71
US5142149AAug 25, 1992
Electron microscope
HITACHI LTD5 citations63
US4775790AOct 4, 1988
Transmission electron microscope
HITACHI LTD2 citations63
US7462830B2Dec 9, 2008
Method and apparatus for observing inside structures, and specimen holder
HITACHI LTD2 citations62
US5008536AApr 16, 1991
Electron microscope having electrical and mechanical position controls for specimen and positioning method
HITACHI LTD3 citations62
US4283627AAug 11, 1981
Electron microscope
HITACHI LTD2 citations61
HITACHI HIGH TECH CORP
7 patentsUS7250601B2Jul 31, 2007
Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method
HITACHI HIGH TECH CORP15 citations92
US7067805B2Jun 27, 2006
Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method
HITACHI HIGH TECH CORP17 citations89
US6930306B2Aug 16, 2005
Electron microscope
HITACHI HIGH TECH CORP15 citations84
US7372047B2May 13, 2008
Charged particle system and a method for measuring image magnification
HITACHI HIGH TECH CORP2 citations63
US7923701B2Apr 12, 2011
Charged particle beam equipment
HITACHI HIGH TECH CORP4 citations62
US7375330B2May 20, 2008
Charged particle beam equipment
HITACHI HIGH TECH CORP4 citations62
US6855927B2Feb 15, 2005
Method and apparatus for observing element distribution
HITACHI HIGH TECH CORP3 citations58