Inventor
ICHIHASHI MIKIO
JP37 patents
⚠️ This page may combine multiple inventors who share the name “ICHIHASHI MIKIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
32 patentsUS6531697B1Mar 11, 2003
Method and apparatus for scanning transmission electron microscopy
HITACHI LTD59 citations96
US6348690B1Feb 19, 2002
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD51 citations96
US6051834AApr 18, 2000
Electron microscope
HITACHI LTD65 citations96
US5866905AFeb 2, 1999
Electron microscope
HITACHI LTD74 citations96
US5324950AJun 28, 1994
Charged particle beam apparatus
HITACHI LTD59 citations96
US5783830AJul 21, 1998
Sample evaluation/process observation system and method
HITACHI LTD85 citations95
US5442183AAug 15, 1995
Charged particle beam apparatus including means for maintaining a vacuum seal
HITACHI LTD47 citations95
US5187371AFeb 16, 1993
Charged particle beam apparatus
HITACHI LTD55 citations95
US6822233B2Nov 23, 2004
Method and apparatus for scanning transmission electron microscopy
HITACHI LTD31 citations92
US6750451B2Jun 15, 2004
Observation apparatus and observation method using an electron beam
HITACHI LTD32 citations92
US6452178B2Sep 17, 2002
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD23 citations92
US5552602ASep 3, 1996
Electron microscope
HITACHI LTD41 citations92
US5373158ADec 13, 1994
Field-emission transmission electron microscope and operation method thereof
HITACHI LTD21 citations92
US5254856AOct 19, 1993
Charged particle beam apparatus having particular electrostatic objective lens and vacuum pump systems
HITACHI LTD43 citations92
US5229607AJul 20, 1993
Combination apparatus having a scanning electron microscope therein
HITACHI LTD47 citations92
US4600839AJul 15, 1986
Small-dimension measurement system by scanning electron beam
HITACHI LTD35 citations92
US6987265B2Jan 17, 2006
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD9 citations82
US5153434AOct 6, 1992
Electron microscope and method for observing microscopic image
HITACHI LTD21 citations82
US4767926AAug 30, 1988
Electron beam metrology system
HITACHI LTD23 citations82
US7439506B2Oct 21, 2008
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD3 citations74
US7012252B2Mar 14, 2006
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD5 citations74
US6512227B2Jan 28, 2003
Method and apparatus for inspecting patterns of a semiconductor device with an electron beam
HITACHI LTD10 citations74
US5134289AJul 28, 1992
Field emission electron device which produces a constant beam current
HITACHI LTD7 citations74
US4751384AJun 14, 1988
Electron beam metrology system
HITACHI LTD10 citations74
US4670652AJun 2, 1987
Charged particle beam microprobe apparatus
HITACHI LTD19 citations74
US5442182AAug 15, 1995
Electron lens
HITACHI LTD16 citations73
US4605860AAug 12, 1986
Apparatus for focusing a charged particle beam onto a specimen
HITACHI LTD9 citations73
US4740693AApr 26, 1988
Electron beam pattern line width measurement system
HITACHI LTD4 citations63
US4772821ASep 20, 1988
Apparatus for introducing oxygen gas
HITACHI LTD2 citations62
US7022988B2Apr 4, 2006
Method and apparatus for measuring physical properties of micro region
HITACHI LTD4 citations59
US7232996B2Jun 19, 2007
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD0 citations52
US7385198B2Jun 10, 2008
Method and apparatus for measuring the physical properties of micro region
HITACHI LTD1 citations48