Inventor
IIJIMA TOMOHIRO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “IIJIMA TOMOHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
11 patentsUS7740991B2Jun 22, 2010
Beam dose computing method and writing method and record carrier body and writing apparatus for determining an optimal dose of a charged particle beam
NUFLARE TECHNOLOGY INC19 citations92
US8352889B2Jan 8, 2013
Beam dose computing method and writing method and record carrier body and writing apparatus
NUFLARE TECHNOLOGY INC5 citations83
US7608845B2Oct 27, 2009
Charged particle beam writing apparatus and method thereof, and method for resizing dimension variation due to loading effect
NUFLARE TECHNOLOGY INC11 citations83
US7511290B2Mar 31, 2009
Charged particle beam writing method and apparatus
NUFLARE TECHNOLOGY INC16 citations83
US7872745B2Jan 18, 2011
Pattern inspection apparatus and pattern inspection method
NUFLARE TECHNOLOGY INC9 citations82
US7657863B2Feb 2, 2010
Pattern area value calculating method, proximity effect correcting method, and charged particle beam writing method and apparatus
NUFLARE TECHNOLOGY INC11 citations82
US7619230B2Nov 17, 2009
Charged particle beam writing method and apparatus and readable storage medium
NUFLARE TECHNOLOGY INC10 citations82
US9202673B2Dec 1, 2015
Multi charged particle beam writing method and multi charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC4 citations73
US7476881B2Jan 13, 2009
Charged beam drawing apparatus and charged beam drawing method
NUFLARE TECHNOLOGY INC3 citations59
US10020159B2Jul 10, 2018
Multi charged particle beam writing method and multi charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations52
US9570267B2Feb 14, 2017
Multi charged particle beam writing method and multi charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations52