Inventor
MINSHALL EDMUND
US5 patents
⚠️ This page may combine multiple inventors who share the name “MINSHALL EDMUND”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
3 patentsUS9758868B1Sep 12, 2017
Plasma suppression behind a showerhead through the use of increased pressure
LAM RES CORP24 citations93
US10622243B2Apr 14, 2020
Planar substrate edge contact with open volume equalization pathways and side containment
LAM RES CORP2 citations72
US11443975B2Sep 13, 2022
Planar substrate edge contact with open volume equalization pathways and side containment
LAM RES CORP0 citations62