Inventor
ARISAWA YUKIYASU
JP9 patents
⚠️ This page may combine multiple inventors who share the name “ARISAWA YUKIYASU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
5 patentsUS7941767B2May 10, 2011
Photomask management method and photomask wash limit generating method
TOSHIBA KK32 citations91
US8039177B2Oct 18, 2011
Method of correcting a flare and computer program product
TOSHIBA KK9 citations82
US7636910B2Dec 22, 2009
Photomask quality estimation system and method for use in manufacturing of semiconductor device, and method for manufacturing the semiconductor device
TOSHIBA KK4 citations62
US7912275B2Mar 22, 2011
Method of evaluating a photo mask and method of manufacturing a semiconductor device
TOSHIBA KK0 citations51
US7446852B2Nov 4, 2008
Projection exposure mask acceptance decision system, projection exposure mask acceptance decision method, method for manufacturing semiconductor device, and computer program project
TOSHIBA KK1 citations50
UNO TAIGA
2 patentsUS8617773B2Dec 31, 2013
Method of correcting mask pattern, computer program product, and method of manufacturing semiconductor device
UNO TAIGA1 citations49
US8507160B2Aug 13, 2013
Flare prediction method, photomask manufacturing method, semiconductor device manufacturing method, and computer-readable medium
UNO TAIGA0 citations48