Inventor
YOKOHATA ATSUSHI
JP4 patents
Patents
4 patentsUS10295477B2May 21, 2019
Methods for defect inspection, sorting, and manufacturing photomask blank
SHINETSU CHEMICAL CO4 citations71
US9829787B2Nov 28, 2017
Defect inspecting method, sorting method, and producing method for photomask blank
SHINETSU CHEMICAL CO3 citations71
US9772551B2Sep 26, 2017
Evaluation method of defect size of photomask blank, selection method, and manufacturing method
SHINETSU CHEMICAL CO2 citations71
US9829442B2Nov 28, 2017
Defect inspecting method, sorting method and producing method for photomask blank
SHINETSU CHEMICAL CO1 citations50