Inventor
Cheng wei chang
TW24 patents
Patents
24 patentsUS11513083B2Nov 29, 2022
Photolithography method and photolithography system
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10948824B2Mar 16, 2021
Dispensing nozzle design and dispensing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US12429775B2Sep 30, 2025
Dispensing nozzle design and dispensing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12017322B2Jun 25, 2024
Chemical mechanical polishing method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11959864B2Apr 16, 2024
Photolithography method and photolithography system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11703761B2Jul 18, 2023
Temperature controlling apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11675264B2Jun 13, 2023
Reticle cleaning system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11599026B2Mar 7, 2023
Dispensing nozzle design and dispensing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11099139B2Aug 24, 2021
Photolithography method and photolithography system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11067891B2Jul 20, 2021
Temperature controlling apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10955741B2Mar 23, 2021
Reticle cleaning system and method for using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12048944B2Jul 30, 2024
Method of operating drippage prevention system
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US11980920B2May 14, 2024
Apparatus and methods for exhaust cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11130107B2Sep 28, 2021
Method for providing deionized water with dynamic electrical resistivity
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11035619B2Jun 15, 2021
Drainage for temperature and humidity controlling system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10987706B2Apr 27, 2021
Apparatus and methods for exhaust cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10792697B2Oct 6, 2020
Drippage prevention system and method of operating same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US10464032B2Nov 5, 2019
System and method for providing deionized water with dynamic electrical resistivity
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US11022018B2Jun 1, 2021
Exhaust system and method of using
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10678133B2Jun 9, 2020
Method for forming photoresist layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10670540B2Jun 2, 2020
Photolithography method and photolithography system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10509321B2Dec 17, 2019
Temperature controlling apparatus and method for forming coating layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10618085B2Apr 14, 2020
Apparatus and methods for exhaust cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10473021B2Nov 12, 2019
Exhaust system and method of using
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48