Inventor
HSIEH PING HAN
US9 patents
Patents
9 patentsUS9240315B1Jan 19, 2016
CVD oxide surface pre-conditioning by inductively coupled O2 plasma
APPLIED MATERIALS INC122 citations96
US10861693B2Dec 8, 2020
Cleaning method
APPLIED MATERIALS INC14 citations84
US9870921B2Jan 16, 2018
Cleaning method
APPLIED MATERIALS INC6 citations83
US11087979B2Aug 10, 2021
Cleaning method
APPLIED MATERIALS INC1 citations72
US10199221B2Feb 5, 2019
Cleaning method
APPLIED MATERIALS INC2 citations72
US11088000B2Aug 10, 2021
Wafer based corrosion and time dependent chemical effects
APPLIED MATERIALS INC0 citations59
US10008388B2Jun 26, 2018
Device conformity control by low temperature, low pressure, inductively coupled ammonia-nitrogen trifluoride plasma
APPLIED MATERIALS INC0 citations50
US10515862B2Dec 24, 2019
Wafer based corrosion and time dependent chemical effects
APPLIED MATERIALS INC0 citations49
US9472416B2Oct 18, 2016
Methods of surface interface engineering
APPLIED MATERIALS INC0 citations39