Inventor
VAN DORST RINGO PETRUS CORNELIS
NL4 patents
Patents
4 patentsUS11664264B2May 30, 2023
Lithographic apparatus, method for unloading a substrate and method for loading a substrate
ASML NETHERLANDS BV2 citations66
US12140873B2Nov 12, 2024
Positioning device
ASML NETHERLANDS BV0 citations46
US11726411B2Aug 15, 2023
Substrate shape measuring device, substrate handling device, substrate shape measuring unit and method to handle substrates
ASML NETHERLANDS BV0 citations46
US11243476B2Feb 8, 2022
Stage apparatus, lithographic apparatus, control unit and method
ASML NETHERLANDS BV0 citations46