Inventor
SMEETS BENJAMIN CUNNEGONDA HENRICUS
NL4 patents
⚠️ This page may combine multiple inventors who share the name “SMEETS BENJAMIN CUNNEGONDA HENRICUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
3 patentsUS10551746B2Feb 4, 2020
Lithographic apparatus and method
ASML NETHERLANDS BV2 citations68
US11243476B2Feb 8, 2022
Stage apparatus, lithographic apparatus, control unit and method
ASML NETHERLANDS BV0 citations46
US11914307B2Feb 27, 2024
Inspection apparatus lithographic apparatus measurement method
ASML NETHERLANDS BV0 citations39