Inventor
LEAL CERVANTES CARMEN
US7 patents
Patents
7 patentsUS12211743B2Jan 28, 2025
Method of forming a metal liner for interconnect structures
APPLIED MATERIALS INC3 citations73
US11756784B2Sep 12, 2023
Methods for aluminum oxide surface recovery
APPLIED MATERIALS INC0 citations60
US11443936B2Sep 13, 2022
Methods and apparatus for aluminum oxide surface recovery
APPLIED MATERIALS INC0 citations60
US12568803B2Mar 3, 2026
Methods of forming interconnect structures
APPLIED MATERIALS INC0 citations58
US11939666B2Mar 26, 2024
Methods and apparatus for precleaning and treating wafer surfaces
APPLIED MATERIALS INC0 citations50
US12252779B2Mar 18, 2025
Methods for in-situ chamber monitoring
APPLIED MATERIALS INC0 citations49
US12559840B2Feb 24, 2026
Apparatus and methods for self-assembled monolayer (SAM) deposition in semiconductor equipment
APPLIED MATERIALS INC0 citations41