Inventor
LUKENS JOSHUA MARK
US5 patents
Patents
5 patentsUS12452986B2Oct 21, 2025
Nozzle apparatus
ASML NETHERLANDS BV0 citations58
US11690159B2Jun 27, 2023
Apparatus and method for extending target material delivery system lifetime
ASML NETHERLANDS BV0 citations58
US12339214B2Jun 24, 2025
Apparatus for and method of monitoring droplets in a droplet stream
ASML NETHERLANDS BV0 citations54
US11240904B2Feb 1, 2022
Apparatus for and method of controlling coalescence of droplets in a droplet stream
ASML NETHERLANDS BV1 citations54
US11963285B2Apr 16, 2024
Target material control in an EUV light source
ASML NETHERLANDS BV0 citations40