Inventor
TEDROW JON DAVID
US6 patents
Patents
6 patentsUS11988307B2May 21, 2024
Anti-rotation fluid connection
ASML NETHERLANDS BV0 citations56
US11988967B2May 21, 2024
Target material supply apparatus and method
ASML NETHERLANDS BV1 citations56
US11500297B2Nov 15, 2022
Anti-rotation coupling
ASML NETHERLANDS BV0 citations54
US11774012B2Oct 3, 2023
Apparatus for high pressure connection
ASML NETHERLANDS BV0 citations53
US10437162B2Oct 8, 2019
Methods and apparatuses for protecting a seal in a pressure vessel of a photolithography system
ASML NETHERLANDS BV0 citations44
US11963285B2Apr 16, 2024
Target material control in an EUV light source
ASML NETHERLANDS BV0 citations40