Inventor
DURBIN AARON
US14 patents
⚠️ This page may combine multiple inventors who share the name “DURBIN AARON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
6 patentsUS10633742B2Apr 28, 2020
Use of voltage and current measurements to control dual zone ceramic pedestals
LAM RES CORP6 citations81
US11028482B2Jun 8, 2021
Use of voltage and current measurements to control dual zone ceramic pedestals
LAM RES CORP3 citations70
USD948658SApr 12, 2022
High density hole pattern dual plenum hole showerhead assembly
LAM RES CORP5 citations67
US12322617B2Jun 3, 2025
Dual zone heaters for metallic pedestals
LAM RES CORP0 citations62
US11908715B2Feb 20, 2024
Dynamic temperature control of substrate support in substrate processing system
LAM RES CORP1 citations62
US12577666B2Mar 17, 2026
Precursor dispensing systems with line charge volume containers for atomic layer deposition
LAM RES CORP0 citations45
ADVANCED INQUIRY SYSTEMS INC
3 patentsUS8872533B2Oct 28, 2014
Wafer testing system and associated methods of use and manufacture
ADVANCED INQUIRY SYSTEMS INC5 citations82
US9146269B2Sep 29, 2015
Maintaining a wafer/wafer translator pair in an attached state free of a gasket diposed
ADVANCED INQUIRY SYSTEMS INC0 citations50
US8362797B2Jan 29, 2013
Maintaining a wafer/wafer translator pair in an attached state free of a gasket disposed therebetween
ADVANCED INQUIRY SYSTEMS INC1 citations50
TRANSLARITY INC
3 patentsUS10571489B2Feb 25, 2020
Wafer testing system and associated methods of use and manufacture
TRANSLARITY INC0 citations50
US9612259B2Apr 4, 2017
Wafer testing system and associated methods of use and manufacture
TRANSLARITY INC0 citations50
US9176186B2Nov 3, 2015
Maintaining a wafer/wafer translator pair in an attached state free of a gasket disposed
TRANSLARITY INC0 citations50