Inventor
CHANG CHEN LIANG
TW10 patents
⚠️ This page may combine multiple inventors who share the name “CHANG CHEN LIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
8 patentsUS10658296B2May 19, 2020
Dielectric film for semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US10998219B2May 4, 2021
Wafer support device and method for removing lift pin therefrom
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations65
US11901295B2Feb 13, 2024
Dielectric film for semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11296027B2Apr 5, 2022
Dielectric film for semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11152306B2Oct 19, 2021
Dielectric film for semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12412773B2Sep 9, 2025
Vacuum chuck
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations55
US12322615B2Jun 3, 2025
De-tape tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations55
US10522369B2Dec 31, 2019
Method and system for cleaning wafer and scrubber
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations30