Inventor
TOMOZAWA AKIHIRO
JP5 patents
Patents
5 patentsUS4782037ANov 1, 1988
Process of fabricating a semiconductor insulated circuit device having a phosphosilicate glass insulating film
HITACHI LTD49 citations90
US3935083AJan 27, 1976
Method of forming insulating film on interconnection layer
HITACHI LTD51 citations89
US4377819AMar 22, 1983
Semiconductor device
HITACHI LTD23 citations81
US4014718AMar 29, 1977
Method of making integrated circuits free from the formation of a parasitic PNPN thyristor
HITACHI LTD8 citations73
US3972756AAug 3, 1976
Method of producing MIS structure
HITACHI LTD12 citations65