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Inventor
TSAI BIN-MING BEN
US
3 patents
⚠️ This page may combine multiple inventors who share the name “TSAI BIN-MING BEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA INSTR CORP
1 patent
US6021214A
Feb 1, 2000
Inspection method and apparatus for the inspection of either random or repeating patterns
KLA INSTR CORP
83 citations
94
(unassigned)
1 patent
US6665432B1
Dec 16, 2003
Inspection method and apparatus for the inspection of either random or repeating patterns
37 citations
93
KLA TENCOR TECH CORP
1 patent
US7218768B2
May 15, 2007
Inspection method and apparatus for the inspection of either random or repeating patterns
KLA TENCOR TECH CORP
4 citations
71