Inventor
AYA SUNAO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “AYA SUNAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
9 patentsUS6265113B1Jul 24, 2001
Stress adjustment method of X-ray mask
MITSUBISHI ELECTRIC CORP344 citations97
US5677090AOct 14, 1997
Method of making X-ray mask having reduced stress
MITSUBISHI ELECTRIC CORP20 citations91
US10043635B2Aug 7, 2018
Ion implantation apparatus
MITSUBISHI ELECTRIC CORP3 citations71
US5953492ASep 14, 1999
Method of manufacturing X-ray mask and heating apparatus
MITSUBISHI ELECTRIC CORP6 citations71
US6212252B1Apr 3, 2001
X-ray mask provided with an alignment mark and method of manufacturing the same
MITSUBISHI ELECTRIC CORP13 citations70
US6190808B1Feb 20, 2001
X-ray mask and method of manufacturing the same
MITSUBISHI ELECTRIC CORP2 citations62
US5834142ANov 10, 1998
Method of manufacturing X-ray mask and heating apparatus
MITSUBISHI ELECTRIC CORP3 citations60
US9188872B2Nov 17, 2015
Method for manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP0 citations46
US9063428B2Jun 23, 2015
Method for manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP0 citations35