Inventor
HANSEN STEVE
US14 patents
⚠️ This page may combine multiple inventors who share the name “HANSEN STEVE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML MASKTOOLS BV
3 patentsUS8050898B2Nov 1, 2011
Method, program product and apparatus for predicting line width roughness and resist pattern failure and the use thereof in a lithography simulation process
ASML MASKTOOLS BV29 citations91
US7292315B2Nov 6, 2007
Optimized polarization illumination
ASML MASKTOOLS BV17 citations91
US7710544B2May 4, 2010
Optimized polarization illumination
ASML MASKTOOLS BV2 citations61