Inventor
HORNER GREGORY S
US24 patents
⚠️ This page may combine multiple inventors who share the name “HORNER GREGORY S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
9 patentsUS7012438B1Mar 14, 2006
Methods and systems for determining a property of an insulating film
KLA TENCOR TECH CORP63 citations98
US6734696B2May 11, 2004
Non-contact hysteresis measurements of insulating films
KLA TENCOR TECH CORP57 citations96
US7248062B1Jul 24, 2007
Contactless charge measurement of product wafers and control of corona generation and deposition
KLA TENCOR TECH CORP30 citations92
US7064565B1Jun 20, 2006
Methods and systems for determining an electrical property of an insulating film
KLA TENCOR TECH CORP21 citations92
US7075318B1Jul 11, 2006
Methods for imperfect insulating film electrical thickness/capacitance measurement
KLA TENCOR TECH CORP20 citations90
US7358748B1Apr 15, 2008
Methods and systems for determining a property of an insulating film
KLA TENCOR TECH CORP14 citations84
US7719294B1May 18, 2010
Systems configured to perform a non-contact method for determining a property of a specimen
KLA TENCOR TECH CORP10 citations83
US7538333B1May 26, 2009
Contactless charge measurement of product wafers and control of corona generation and deposition
KLA TENCOR TECH CORP3 citations62
US7397254B1Jul 8, 2008
Methods for imperfect insulating film electrical thickness/capacitance measurement
KLA TENCOR TECH CORP1 citations48
(unassigned)
9 patentsUS6191605B1Feb 20, 2001
Contactless method for measuring total charge of an insulating layer on a substrate using corona charge
111 citations98
US6097196AAug 1, 2000
Non-contact tunnelling field measurement for a semiconductor oxide layer
116 citations98
US6202029B1Mar 13, 2001
Non-contact electrical conduction measurement for insulating films
90 citations97
US6121783ASep 19, 2000
Method and apparatus for establishing electrical contact between a wafer and a chuck
103 citations95
US6060709AMay 9, 2000
Apparatus and method for depositing uniform charge on a thin oxide semiconductor wafer
64 citations95
US6771092B1Aug 3, 2004
Non-contact mobile charge measurement with leakage band-bending and dipole correction
21 citations92
US6937050B1Aug 30, 2005
Non-contact mobile charge measurement with leakage band-bending and dipole correction
10 citations73
US6335630B2Jan 1, 2002
Contactless method for measuring total charge of an oxide layer on a semiconductor wafer using corona charge
6 citations73
US6448804B2Sep 10, 2002
Contactless total charge measurement with corona
3 citations62