Inventor
MILLER TOM G
US7 patents
⚠️ This page may combine multiple inventors who share the name “MILLER TOM G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
(unassigned)
6 patentsUS6191605B1Feb 20, 2001
Contactless method for measuring total charge of an insulating layer on a substrate using corona charge
111 citations98
US6097196AAug 1, 2000
Non-contact tunnelling field measurement for a semiconductor oxide layer
116 citations98
US6202029B1Mar 13, 2001
Non-contact electrical conduction measurement for insulating films
90 citations97
US6060709AMay 9, 2000
Apparatus and method for depositing uniform charge on a thin oxide semiconductor wafer
64 citations95
US6335630B2Jan 1, 2002
Contactless method for measuring total charge of an oxide layer on a semiconductor wafer using corona charge
6 citations73
US6448804B2Sep 10, 2002
Contactless total charge measurement with corona
3 citations62