Inventor
YASUHARA MOYURU
JP6 patents
Patents
6 patentsUS7138607B2Nov 21, 2006
Determining method of thermal processing condition
TOKYO ELECTRON LTD30 citations92
US6803548B2Oct 12, 2004
Batch-type heat treatment apparatus and control method for the batch-type heat treatment apparatus
TOKYO ELECTRON LTD36 citations92
US6787377B2Sep 7, 2004
Determining method of thermal processing condition
TOKYO ELECTRON LTD16 citations92
US6730885B2May 4, 2004
Batch type heat treatment system, method for controlling same, and heat treatment method
TOKYO ELECTRON LTD23 citations92
US6329643B1Dec 11, 2001
Method of temperature-calibrating heat treating apparatus
TOKYO ELECTRON LTD28 citations92
US6495805B2Dec 17, 2002
Method of determining set temperature trajectory for heat treatment system
TOKYO ELECTRON LTD12 citations73