Inventor

GADGIL PRASAD N

US6 patents

⚠️ This page may combine multiple inventors who share the name “GADGIL PRASAD N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GENUS INC

3 patents

US6174377B1Jan 16, 2001

Processing chamber for atomic layer deposition processes

GENUS INC639 citations98

US5879459AMar 9, 1999

Vertically-stacked process reactor and cluster tool system for atomic layer deposition

GENUS INC1,209 citations98

US6387185B2May 14, 2002

Processing chamber for atomic layer deposition processes

GENUS INC123 citations97

UNIV FRASER SIMON

1 patent

US5284519AFeb 8, 1994

Inverted diffuser stagnation point flow reactor for vapor deposition of thin films

UNIV FRASER SIMON594 citations98

NOVELLUS SYSTEMS INC

1 patent

US6563092B1May 13, 2003

Measurement of substrate temperature in a process chamber using non-contact filtered infrared pyrometry

NOVELLUS SYSTEMS INC73 citations93

GADGIL PRASAD N

1 patent

US7365005B1Apr 29, 2008

Method for filling of a recessed structure of a semiconductor device

GADGIL PRASAD N31 citations88