Inventor
TOJO TORU
JP47 patents
⚠️ This page may combine multiple inventors who share the name “TOJO TORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
34 patentsUS6084716AJul 4, 2000
Optical substrate inspection apparatus
TOSHIBA KK89 citations96
US5960106ASep 28, 1999
Sample inspection apparatus and sample inspection method
TOSHIBA KK57 citations96
US5744381AApr 28, 1998
Method of inspecting a pattern formed on a sample for a defect, and an apparatus thereof
TOSHIBA KK60 citations96
US4811062AMar 7, 1989
Method for aligning first and second objects relative to each other and apparatus for practicing this method
TOSHIBA KK82 citations96
US6281510B1Aug 28, 2001
Sample transferring method and sample transfer supporting apparatus
TOSHIBA KK52 citations95
US6090176AJul 18, 2000
Sample transferring method and sample transfer supporting apparatus
TOSHIBA KK62 citations95
US7526119B2Apr 28, 2009
Pattern inspection apparatus
TOSHIBA KK21 citations92
US5404410AApr 4, 1995
Method and system for generating a bit pattern
TOSHIBA KK38 citations92
US5379348AJan 3, 1995
Pattern defects inspection system
TOSHIBA KK22 citations92
US4902133AFeb 20, 1990
Method and an apparatus for aligning first and second objects with each other
TOSHIBA KK25 citations92
US5912468AJun 15, 1999
Charged particle beam exposure system
TOSHIBA KK22 citations91
US7590277B2Sep 15, 2009
Pattern inspecting method
TOSHIBA KK15 citations84
US7421109B2Sep 2, 2008
Pattern inspection apparatus
TOSHIBA KK13 citations84
US7345755B2Mar 18, 2008
Defect inspecting apparatus and defect inspection method
TOSHIBA KK12 citations84
US7123345B2Oct 17, 2006
Automatic focusing apparatus
TOSHIBA KK16 citations84
US4578607AMar 25, 1986
Piezoelectric precise rotation mechanism for slightly rotating an object
TOSHIBA KK20 citations82
US4469949ASep 4, 1984
Electron beam pattern transfer device and method for aligning mask and semiconductor wafer
TOSHIBA KK21 citations82
US7551767B2Jun 23, 2009
Pattern inspection apparatus
TOSHIBA KK5 citations74
US7508526B2Mar 24, 2009
Defect inspecting apparatus
TOSHIBA KK7 citations74
US7304730B2Dec 4, 2007
Inspection apparatus having two sensors, method for inspecting an object, and a method for manufacturing a photolithography mask
TOSHIBA KK8 citations74
US6239443B1May 29, 2001
Apparatus for emitting a beam to a sample used for manufacturing a semiconducor device
TOSHIBA KK7 citations74
US5828457AOct 27, 1998
Sample inspection apparatus and sample inspection method
TOSHIBA KK14 citations74
US4808002AFeb 28, 1989
Method and device for aligning first and second objects relative to each other
TOSHIBA KK7 citations74
US6676289B2Jan 13, 2004
Temperature measuring method in pattern drawing apparatus
TOSHIBA KK10 citations73
US6346354B1Feb 12, 2002
Pattern writing method
TOSHIBA KK12 citations73
US6182369B1Feb 6, 2001
Pattern forming apparatus
TOSHIBA KK10 citations73
US4984890AJan 15, 1991
Method and an apparatus for aligning first and second objects with each other
TOSHIBA KK15 citations73
US7075621B2Jul 11, 2006
Alignment method
TOSHIBA KK8 citations72
US6901314B2May 31, 2005
Alignment apparatus for substrates
TOSHIBA KK10 citations72
US5602645AFeb 11, 1997
Pattern evaluation apparatus and a method of pattern evaluation
TOSHIBA KK12 citations72
US7522276B2Apr 21, 2009
Pattern inspection method
TOSHIBA KK2 citations63
US7415149B2Aug 19, 2008
Pattern inspection apparatus
TOSHIBA KK3 citations63
US7372560B2May 13, 2008
Pattern inspection apparatus
TOSHIBA KK3 citations63
US7359546B2Apr 15, 2008
Defect inspection apparatus and defect inspection method
TOSHIBA KK4 citations63
TOKYO SHIBAURA ELECTRIC CO
8 patentsUS4532423AJul 30, 1985
IC Tester using an electron beam capable of easily setting a probe card unit for wafers & packaged IC's to be tested
TOKYO SHIBAURA ELECTRIC CO144 citations98
US4480284AOct 30, 1984
Electrostatic chuck plate
TOKYO SHIBAURA ELECTRIC CO470 citations98
US4455501AJun 19, 1984
Precision rotation mechanism
TOKYO SHIBAURA ELECTRIC CO28 citations93
US4262974AApr 21, 1981
Linear bearing apparatus
TOKYO SHIBAURA ELECTRIC CO29 citations88
US4572956AFeb 25, 1986
Electron beam pattern transfer system having an autofocusing mechanism
TOKYO SHIBAURA ELECTRIC CO21 citations81
US4698513AOct 6, 1987
Position detector by vibrating a light beam for averaging the reflected light
TOKYO SHIBAURA ELECTRIC CO14 citations74
US4467210AAug 21, 1984
Electron-beam image transfer device
TOKYO SHIBAURA ELECTRIC CO9 citations74
US4558225ADec 10, 1985
Target body position measuring method for charged particle beam fine pattern exposure system
TOKYO SHIBAURA ELECTRIC CO15 citations73
TOPCON CORP
3 patentsUS6080990AJun 27, 2000
Position measuring apparatus
TOPCON CORP36 citations93
US6100970AAug 8, 2000
Apparatus for inspecting slight defects on a photomask pattern
TOPCON CORP6 citations74
US5812259ASep 22, 1998
Method and apparatus for inspecting slight defects in a photomask pattern
TOPCON CORP7 citations74