Inventor
HIRANO RYOICHI
JP33 patents
⚠️ This page may combine multiple inventors who share the name “HIRANO RYOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
14 patentsUS5151754ASep 29, 1992
Method and an apparatus for measuring a displacement between two objects and a method and an apparatus for measuring a gap distance between two objects
TOSHIBA KK160 citations98
US6281510B1Aug 28, 2001
Sample transferring method and sample transfer supporting apparatus
TOSHIBA KK52 citations95
US6090176AJul 18, 2000
Sample transferring method and sample transfer supporting apparatus
TOSHIBA KK62 citations95
US5912468AJun 15, 1999
Charged particle beam exposure system
TOSHIBA KK22 citations91
US5100234AMar 31, 1992
Method and apparatus for aligning two objects, and method and apparatus for providing a desired gap between two objects
TOSHIBA KK18 citations82
US6239443B1May 29, 2001
Apparatus for emitting a beam to a sample used for manufacturing a semiconducor device
TOSHIBA KK7 citations74
US10997713B2May 4, 2021
Inspection device, inspection method, and storage medium
TOSHIBA KK4 citations73
US6676289B2Jan 13, 2004
Temperature measuring method in pattern drawing apparatus
TOSHIBA KK10 citations73
US6182369B1Feb 6, 2001
Pattern forming apparatus
TOSHIBA KK10 citations73
US4988197AJan 29, 1991
Method and apparatus for aligning two objects, and method and apparatus for providing a desired gap between two objects
TOSHIBA KK8 citations73
US4838693AJun 13, 1989
Method and apparatus for setting a gap between first and second objects to a predetermined distance
TOSHIBA KK16 citations73
US7894051B2Feb 22, 2011
Reticle defect inspection apparatus and reticle defect inspection method
TOSHIBA KK2 citations63
US5442445AAug 15, 1995
Registration method and apparatus therefor
TOSHIBA KK4 citations60
US8049897B2Nov 1, 2011
Reticle defect inspection apparatus and inspection method using thereof
TOSHIBA KK0 citations52
NUFLARE TECHNOLOGY INC
9 patentsUS11004193B2May 11, 2021
Inspection method and inspection apparatus
NUFLARE TECHNOLOGY INC2 citations73
US12373939B2Jul 29, 2025
Defect inspection method
NUFLARE TECHNOLOGY INC0 citations62
US11995817B2May 28, 2024
Defect inspection method
NUFLARE TECHNOLOGY INC0 citations62
US10984525B2Apr 20, 2021
Pattern inspection method and pattern inspection apparatus
NUFLARE TECHNOLOGY INC0 citations62
US10984978B2Apr 20, 2021
Multiple electron beam inspection apparatus and multiple electron beam inspection method
NUFLARE TECHNOLOGY INC1 citations62
US10846846B2Nov 24, 2020
Pattern inspection apparatus and pattern inspection method
NUFLARE TECHNOLOGY INC1 citations62
US10775326B2Sep 15, 2020
Electron beam inspection apparatus and electron beam inspection method
NUFLARE TECHNOLOGY INC1 citations62
US10712295B2Jul 14, 2020
Electron beam inspection apparatus and electron beam inspection method
NUFLARE TECHNOLOGY INC1 citations62
US12579635B2Mar 17, 2026
Pattern inspection apparatus and pattern inspection method inspecting a pattern using an image corrected using offset amount based upon dark noise levels
NUFLARE TECHNOLOGY INC0 citations52
MITSUBISHI ELECTRIC CORP
5 patentsUS5519720AMay 21, 1996
Semiconductor light emitting device
MITSUBISHI ELECTRIC CORP145 citations99
US5642373AJun 24, 1997
Monolithic semiconductor laser array of radially disposed lasers
MITSUBISHI ELECTRIC CORP22 citations86
US4637845AJan 20, 1987
Method of manufacturing semiconductor light emitting device
MITSUBISHI ELECTRIC CORP3 citations63
US4561096ADec 24, 1985
Buried semiconductor laser avoiding thyristor action
MITSUBISHI ELECTRIC CORP3 citations60
US4504328AMar 12, 1985
Liquid phase epitaxial growth technique
MITSUBISHI ELECTRIC CORP0 citations41