Inventor
MCANDREW JAMES
US11 patents
⚠️ This page may combine multiple inventors who share the name “MCANDREW JAMES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AIR LIQUIDE AMERICAN
9 patentsUS5963336AOct 5, 1999
Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use
AIR LIQUIDE AMERICAN108 citations97
US5880850AMar 9, 1999
Method and system for sensitive detection of molecular species in a vacuum by harmonic detection spectroscopy
AIR LIQUIDE AMERICAN61 citations95
US5818578AOct 6, 1998
Polygonal planar multipass cell, system and apparatus including same, and method of use
AIR LIQUIDE AMERICAN61 citations95
US6154284ANov 28, 2000
Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use
AIR LIQUIDE AMERICAN61 citations94
US6493086B1Dec 10, 2002
Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use
AIR LIQUIDE AMERICAN34 citations91
US6885452B2Apr 26, 2005
Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use
AIR LIQUIDE AMERICAN8 citations73
US5742399AApr 21, 1998
Method for stabilizing the wavelength in a laser spectrometer system
AIR LIQUIDE AMERICAN16 citations73
US5714678AFeb 3, 1998
Method for rapidly determining an impurity level in a gas source or a gas distribution system
AIR LIQUIDE AMERICAN8 citations71
US5351120ASep 27, 1994
Spectroscopic cell design
AIR LIQUIDE AMERICAN7 citations71