Inventor
LAWHORN JASON M
US3 patents
Patents
3 patentsUS7252871B2Aug 7, 2007
Polishing pad having a pressure relief channel
ROHM & HAAS ELECT MAT32 citations88
US7018581B2Mar 28, 2006
Method of forming a polishing pad with reduced stress window
ROHM & HAAS ELECT MAT28 citations86
US7132033B2Nov 7, 2006
Method of forming a layered polishing pad
ROHM & HAAS ELECT MAT28 citations85