Inventor

HWANG JUNG-SUNG

KR17 patents

⚠️ This page may combine multiple inventors who share the name “HWANG JUNG-SUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HWANG JUNG-SUNG

SAMSUNG ELECTRONICS CO LTD

Analysis system and method for water-soluble contaminants in a cleanroom environment

Substrate processing apparatus and method of processing substrate while controlling for contamination in substrate transfer module

Fresh air ducts including downstream filters for clean rooms

Air conditioning system for semiconductor clean room including a chemical filter downstream of a humidifier

Wafer transfer system

Drive checking system for fan filter units in clean room

Driving control system and monitoring device for fan filter unit in semiconductor clean room

Aqueous compositions for making ultrapure water used in microelectronic device fabrication processes and methods of sterilizing ultrapure water delivery systems using the same

Contamination control system and air-conditioning system of a substrate processing apparatus using the same

Sensitive substance and surface acoustic wave gas sensor using the same

Methods of analyzing water soluble contaminants generated during microelectronic device manufacturing processes

Gas purifying system

Apparatus and method for depositing molecular impurities on a semiconductor wafer

Vibration control pedestal and installation method thereof

Filter protection device for preventing damage to an air filter

Photolithography system and method of monitoring the same

LEE SOO-WOONG

Method of controlling pressure in a wafer transfer system