Inventor
BIRO RYUJI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “BIRO RYUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
11 patentsUS6458253B2Oct 1, 2002
Thin film production process and optical device
CANON KK57 citations96
US5911856AJun 15, 1999
Method for forming thin film
CANON KK55 citations96
US6472087B1Oct 29, 2002
Antireflection film, optical element with antireflection film, and production method of the antireflection film
CANON KK27 citations92
US6217719B1Apr 17, 2001
Process for thin film formation by sputtering
CANON KK30 citations92
US5885712AMar 23, 1999
Anti-reflection film and optical system using the same
CANON KK32 citations92
US5661596AAug 26, 1997
Antireflection film and exposure apparatus using the same
CANON KK43 citations92
US6396626B1May 28, 2002
Antireflection film and optical element coated with the antireflection film
CANON KK12 citations73
US6383346B2May 7, 2002
Method for forming thin films
CANON KK11 citations73
US7301695B2Nov 27, 2007
Anti-reflective film and optical element having anti-reflective film
CANON KK5 citations62
US7041391B2May 9, 2006
Method for forming thin films
CANON KK1 citations52
US7455880B2Nov 25, 2008
Optical element fabrication method, optical element, exposure apparatus, device fabrication method
CANON KK0 citations51