Inventor

NUNAN PETER D

US6 patents

⚠️ This page may combine multiple inventors who share the name “NUNAN PETER D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR TECH CORP

2 patents

US6861666B1Mar 1, 2005

Apparatus and methods for determining and localization of failures in test structures using voltage contrast

KLA TENCOR TECH CORP106 citations97

US7151018B1Dec 19, 2006

Method and apparatus for transistor sidewall salicidation

KLA TENCOR TECH CORP15 citations83

ST MICROELECTRONICS INC

2 patents

US6797640B2Sep 28, 2004

Method of utilizing hard mask for copper plasma etch

ST MICROELECTRONICS INC9 citations68

US6355979B2Mar 12, 2002

Hard mask for copper plasma etch

ST MICROELECTRONICS INC11 citations68

KLA TENCOR CORP

1 patent

US6855568B2Feb 15, 2005

Apparatus and methods for monitoring self-aligned contact arrays using voltage contrast inspection

KLA TENCOR CORP27 citations90

VARIAN SEMICONDUCTOR EQUIPMENT

1 patent

US7619229B2Nov 17, 2009

Technique for matching performance of ion implantation devices using an in-situ mask

VARIAN SEMICONDUCTOR EQUIPMENT2 citations61