Inventor
ADAMS BRET W
US14 patents
⚠️ This page may combine multiple inventors who share the name “ADAMS BRET W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS6939198B1Sep 6, 2005
Polishing system with in-line and in-situ metrology
APPLIED MATERIALS INC70 citations97
US6110011AAug 29, 2000
Integrated electrodeposition and chemical-mechanical polishing tool
APPLIED MATERIALS INC115 citations97
US6352467B1Mar 5, 2002
Integrated electrodeposition and chemical mechanical polishing tool
APPLIED MATERIALS INC48 citations96
US6390908B1May 21, 2002
Determining when to replace a retaining ring used in substrate polishing operations
APPLIED MATERIALS INC77 citations94
US7294039B2Nov 13, 2007
Polishing system with in-line and in-situ metrology
APPLIED MATERIALS INC15 citations92
US7101251B2Sep 5, 2006
Polishing system with in-line and in-situ metrology
APPLIED MATERIALS INC15 citations92
US6632124B2Oct 14, 2003
Optical monitoring in a two-step chemical mechanical polishing process
APPLIED MATERIALS INC17 citations92
US6506097B1Jan 14, 2003
Optical monitoring in a two-step chemical mechanical polishing process
APPLIED MATERIALS INC36 citations92
US6013159AJan 11, 2000
Particle trap in a magnetron sputtering chamber
APPLIED MATERIALS INC52 citations92
US7927182B2Apr 19, 2011
Polishing system with in-line and in-situ metrology
APPLIED MATERIALS INC6 citations73
US7585202B2Sep 8, 2009
Computer-implemented method for process control in chemical mechanical polishing
APPLIED MATERIALS INC4 citations73
US6000415ADec 14, 1999
Method and apparatus for positioning a restrictor shield of a pump in response to an electric signal
APPLIED MATERIALS INC10 citations71