Inventor

SHIAO DANNY ZHENGLONG

CN2 patents

Patents

2 patents

US7776231B2Aug 17, 2010

Chemical mechanical polishing slurries, their applications and method of use thereof

ANJI MICROELECTRONICS SHANGHAI0 citations40

US7947195B2May 24, 2011

Polishing slurry

ANJI MICROELECTRONICS SHANGHAI0 citations36