Inventor
KUROTOBI MAKOTO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “KUROTOBI MAKOTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
3 patentsCANON SALES CO INC
2 patentsUS6479409B2Nov 12, 2002
Fabrication of a semiconductor device with an interlayer insulating film formed from a plasma devoid of an oxidizing agent
CANON SALES CO INC74 citations95
US6472330B1Oct 29, 2002
Method for forming an interlayer insulating film, and semiconductor device
CANON SALES CO INC3 citations61