Inventor

LIEN MING HUEI

TW4 patents

⚠️ This page may combine multiple inventors who share the name “LIEN MING HUEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHEN CHIA-HO

1 patent

US8902561B2Dec 2, 2014

Electrostatic chuck with multi-zone control

CHEN CHIA-HO2 citations54

CHOU YOU-HUA

1 patent

US8796105B2Aug 5, 2014

Method and apparatus for preparing polysilazane on a semiconductor wafer

CHOU YOU-HUA0 citations50

TAIWAN SEMICONDUCTOR MFG CO LTD

1 patent

US9218998B2Dec 22, 2015

Electrostatic chuck with multi-zone control

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations49

LIEN MING HUEI

1 patent

US9287154B2Mar 15, 2016

UV curing system for semiconductors

LIEN MING HUEI0 citations31