Inventor
DANILIN ALEXANDER ALEXANDROVICH
NL3 patents
⚠️ This page may combine multiple inventors who share the name “DANILIN ALEXANDER ALEXANDROVICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
2 patentsUS9395633B2Jul 19, 2016
Lithographic cluster system, method for calibrating a positioning device of a lithographic apparatus
ASML NETHERLANDS BV2 citations55
US10409168B2Sep 10, 2019
Method of predicting performance of a lithographic apparatus, calibration of lithographic apparatus, device manufacturing method
ASML NETHERLANDS BV1 citations54