Inventor
PADIY ALEXANDER VIKTOROVYCH
NL12 patents
⚠️ This page may combine multiple inventors who share the name “PADIY ALEXANDER VIKTOROVYCH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PADIY ALEXANDER VIKTOROVYCH
4 patentsUS8687167B2Apr 1, 2014
Lithographic apparatus and device manufacturing method
PADIY ALEXANDER VIKTOROVYCH7 citations82
US8947630B2Feb 3, 2015
Lithographic apparatus and device manufacturing method
PADIY ALEXANDER VIKTOROVYCH6 citations71
US8947643B2Feb 3, 2015
Lithographic apparatus and method controlling parameter drift by performing multiple patterning passes on reference substrate
PADIY ALEXANDER VIKTOROVYCH3 citations60
US9134625B2Sep 15, 2015
Lithographic apparatus and device manufacturing method for measuring wafer parameters using non-standard alignment settings
PADIY ALEXANDER VIKTOROVYCH1 citations50
MENCHTCHIKOV BORIS
4 patentsUS9310698B2Apr 12, 2016
Method and apparatus for controlling a lithographic apparatus
MENCHTCHIKOV BORIS6 citations71
US8717536B2May 6, 2014
Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product
MENCHTCHIKOV BORIS5 citations71
US9069240B2Jun 30, 2015
Calibration of lithographic apparatus by exposing patterns on substrate positioned at different orientations
MENCHTCHIKOV BORIS0 citations50
US8793099B2Jul 29, 2014
Calibration of lithographic apparatus
MENCHTCHIKOV BORIS1 citations50