Inventor
SON YONG
KR10 patents
Patents
10 patentsUS9778558B2Oct 3, 2017
Mask for photolithography, method of manufacturing the same and method of manufacturing substrate using the same
SAMSUNG DISPLAY CO LTD3 citations72
US9733569B2Aug 15, 2017
Mask, method of manufacturing the same, and method of manufacturing a display panel using the same
SAMSUNG DISPLAY CO LTD2 citations72
US10338463B2Jul 2, 2019
Mask for photolithography, method of manufacturing the same and method of manufacturing substrate using the same
SAMSUNG DISPLAY CO LTD0 citations51
US9885950B2Feb 6, 2018
Phase shift mask, method for manufacturing the same, and method for forming micro pattern
SAMSUNG DISPLAY CO LTD1 citations51
US9436091B2Sep 6, 2016
Patterning method using surface plasmon
SAMSUNG DISPLAY CO LTD0 citations51
US9395619B2Jul 19, 2016
Phase shift mask, patterning method using the same and method of manufacturing display panel using the same
SAMSUNG DISPLAY CO LTD0 citations51
US9977324B2May 22, 2018
Phase shift mask and method of forming patterns using the same
SAMSUNG DISPLAY CO LTD0 citations50
US9632438B2Apr 25, 2017
Phase shift mask and method of forming patterns using the same
SAMSUNG DISPLAY CO LTD0 citations50
US9417516B2Aug 16, 2016
Phase shift mask and method of manufacturing display apparatus using the same
SAMSUNG DISPLAY CO LTD0 citations49
US9417377B2Aug 16, 2016
Display device
SAMSUNG DISPLAY CO LTD0 citations48