Inventor
KUSA HIROAKI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “KUSA HIROAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
6 patentsUS8047896B2Nov 1, 2011
Polishing apparatus, polishing method, and processing apparatus
EBARA CORP11 citations84
US7976361B2Jul 12, 2011
Polishing apparatus and polishing method
EBARA CORP8 citations84
US10166647B2Jan 1, 2019
Polishing apparatus and polishing method
EBARA CORP2 citations73
US10137552B2Nov 27, 2018
Polishing apparatus
EBARA CORP2 citations72
US9649739B2May 16, 2017
Polishing apparatus
EBARA CORP2 citations72
US9517544B2Dec 13, 2016
Polishing apparatus and polishing method
EBARA CORP2 citations63