Inventor
YANG YUN-YEN JACK
US4 patents
Patents
4 patentsUS5968275AOct 19, 1999
Methods and apparatus for passivating a substrate in a plasma reactor
LAM RES CORP593 citations98
US6080680AJun 27, 2000
Method and composition for dry etching in semiconductor fabrication
LAM RES CORP34 citations91
US6221792B1Apr 24, 2001
Metal and metal silicide nitridization in a high density, low pressure plasma reactor
LAM RES CORP40 citations88
US6209551B1Apr 3, 2001
Methods and compositions for post-etch layer stack treatment in semiconductor fabrication
LAM RES CORP14 citations71