Inventor
OZA CHINMAY
US3 patents
Patents
3 patentsUS9250623B2Feb 2, 2016
Methods and systems for fabricating integrated circuits utilizing universal and local processing management
GLOBALFOUNDRIES INC0 citations33
US9748088B2Aug 29, 2017
Method, storage medium and system for controlling the processing of lots of workpieces
GLOBALFOUNDRIES INC0 citations32
US9632499B2Apr 25, 2017
Work-in-progress substrate processing methods and systems for use in the fabrication of integrated circuits
GLOBALFOUNDRIES INC0 citations32