Inventor
PABST DETLEF
US4 patents
⚠️ This page may combine multiple inventors who share the name “PABST DETLEF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GLOBALFOUNDRIES INC
2 patentsUS9748088B2Aug 29, 2017
Method, storage medium and system for controlling the processing of lots of workpieces
GLOBALFOUNDRIES INC0 citations32
US9632499B2Apr 25, 2017
Work-in-progress substrate processing methods and systems for use in the fabrication of integrated circuits
GLOBALFOUNDRIES INC0 citations32