Inventor
RAJAGOPALAN RAVI
US18 patents
⚠️ This page may combine multiple inventors who share the name “RAJAGOPALAN RAVI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS7745333B2Jun 29, 2010
Methods for depositing tungsten layers employing atomic layer deposition techniques
APPLIED MATERIALS INC47 citations97
US6548368B1Apr 15, 2003
Method of forming a MIS capacitor
APPLIED MATERIALS INC84 citations97
US6156382ADec 5, 2000
Chemical vapor deposition process for depositing tungsten
APPLIED MATERIALS INC171 citations97
US7405158B2Jul 29, 2008
Methods for depositing tungsten layers employing atomic layer deposition techniques
APPLIED MATERIALS INC105 citations96
US6274058B1Aug 14, 2001
Remote plasma cleaning method for processing chambers
APPLIED MATERIALS INC106 citations94
US6677254B2Jan 13, 2004
Processes for making a barrier between a dielectric and a conductor and products produced therefrom
APPLIED MATERIALS INC46 citations90
US6204174B1Mar 20, 2001
Method for high rate deposition of tungsten
APPLIED MATERIALS INC16 citations81
US6617266B2Sep 9, 2003
Barium strontium titanate annealing process
APPLIED MATERIALS INC13 citations79
US6174373B1Jan 16, 2001
Non-plasma halogenated gas flow prevent metal residues
APPLIED MATERIALS INC7 citations74
US6070599AJun 6, 2000
Non-plasma halogenated gas flow to prevent metal residues
APPLIED MATERIALS INC10 citations74
US5709772AJan 20, 1998
Non-plasma halogenated gas flow to prevent metal residues
APPLIED MATERIALS INC2 citations63