Inventor
PENG GANG GRANT
US5 patents
⚠️ This page may combine multiple inventors who share the name “PENG GANG GRANT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS11519071B2Dec 6, 2022
Method for fabricating chamber parts
APPLIED MATERIALS INC0 citations61
US11378511B2Jul 5, 2022
Methods and apparatus for detecting corrosion of conductive objects
APPLIED MATERIALS INC0 citations59
US11710647B2Jul 25, 2023
Hyperbaric clean method and apparatus for cleaning semiconductor chamber components
APPLIED MATERIALS INC0 citations43