Inventor
IKEDA HIROTAKA
JP15 patents
Patents
15 patentsUS11038024B2Jun 15, 2021
Self-standing GaN substrate, GaN crystal, method for producing GaN single crystal, and method for producing semiconductor device
MITSUBISHI CHEM CORP4 citations83
US10475887B2Nov 12, 2019
Self-standing GaN substrate, GaN crystal, method for producing GaN single crystal, and method for producing semiconductor device
MITSUBISHI CHEM CORP5 citations83
US11664428B2May 30, 2023
Self-standing GaN substrate, GaN crystal, method for producing GaN single crystal, and method for producing semiconductor device
MITSUBISHI CHEM CORP1 citations72
US11031475B2Jun 8, 2021
Self-standing GaN substrate, GaN crystal, method for producing GaN single crystal, and method for producing semiconductor device
MITSUBISHI CHEM CORP3 citations72
US10734485B2Aug 4, 2020
Gallium nitride substrate and manufacturing method of nitride semiconductor crystal
MITSUBISHI CHEM CORP1 citations71
US12107129B2Oct 1, 2024
Self-standing GaN substrate, GaN crystal, method for producing GaN single crystal, and method for producing semiconductor device
MITSUBISHI CHEM CORP0 citations62
US11670687B2Jun 6, 2023
Gallium nitride substrate and manufacturing method of nitride semiconductor crystal
MITSUBISHI CHEM CORP0 citations61
US10995421B2May 4, 2021
Crystal of nitride of group-13 metal on periodic table, and method for producing the same
MITSUBISHI CHEM CORP0 citations61
US9673046B2Jun 6, 2017
Gallium nitride substrate and manufacturing method of nitride semiconductor crystal
MITSUBISHI CHEM CORP1 citations61
US12571123B2Mar 10, 2026
Gallium nitride crystal, gallium nitride substrate, and method for producing gallium nitride substrate
MITSUBISHI CHEM CORP0 citations59
US10570530B2Feb 25, 2020
Periodic table group 13 metal nitride crystals and method for manufacturing periodic table group 13 metal nitride crystals
MITSUBISHI CHEM CORP0 citations51
US10309038B2Jun 4, 2019
Crystal of nitride of group-13 metal on periodic table, and method for producing the same
MITSUBISHI CHEM CORP0 citations51
US10023976B2Jul 17, 2018
Periodic table group 13 metal nitride crystals and method for manufacturing periodic table group 13 metal nitride crystals
MITSUBISHI CHEM CORP0 citations51
US9890474B2Feb 13, 2018
Crystal of nitride of group-13 metal on periodic table, and method for producing the same
MITSUBISHI CHEM CORP0 citations51
US9840791B2Dec 12, 2017
Periodic table group 13 metal nitride crystals and method for manufacturing periodic table group 13 metal nitride crystals
MITSUBISHI CHEM CORP0 citations51