Inventor
YU TSUNG HSUN
TW5 patents
⚠️ This page may combine multiple inventors who share the name “YU TSUNG HSUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS10510566B2Dec 17, 2019
Cluster tool techniques with improved efficiency
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations82
US11441221B2Sep 13, 2022
Method of performing atomic layer deposition
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10755953B2Aug 25, 2020
Cluster tool techniques with improved efficiency
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10109467B2Oct 23, 2018
Advanced exhaust system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations38