Inventor
EHRNE FLORIAN
CH24 patents
⚠️ This page may combine multiple inventors who share the name “EHRNE FLORIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VAT HOLDING AG
19 patentsUS7011294B1Mar 14, 2006
Vacuum valve
VAT HOLDING AG32 citations91
US6902145B2Jun 7, 2005
Regulating slide valve
VAT HOLDING AG25 citations86
US9957745B2May 1, 2018
Closure device for the vacuum-tight closure of an opening in a wall
VAT HOLDING AG11 citations83
US9976655B2May 22, 2018
Valve
VAT HOLDING AG12 citations79
US10302225B2May 28, 2019
Vacuum valve
VAT HOLDING AG4 citations72
US10234059B2Mar 19, 2019
Vacuum valve
VAT HOLDING AG6 citations72
US9086173B2Jul 21, 2015
Vacuum valve
VAT HOLDING AG5 citations72
US10738895B2Aug 11, 2020
Vacuum valve
VAT HOLDING AG3 citations71
US9157538B2Oct 13, 2015
Method of operating a valve
VAT HOLDING AG4 citations71
US11282725B2Mar 22, 2022
Wafer transfer unit and wafer transfer system
VAT HOLDING AG5 citations69
US11333227B2May 17, 2022
Assembly having a first chamber and at least one second chamber
VAT HOLDING AG0 citations62
US7228687B2Jun 12, 2007
Valve device
VAT HOLDING AG3 citations62
US10770326B2Sep 8, 2020
Positioning device, loading and/or unloading system and method for operating a positioning device
VAT HOLDING AG1 citations60
US12106987B2Oct 1, 2024
Safeguarding device, wafer transport container with at least one safeguarding device, safeguarding system and method with the safeguarding device
VAT HOLDING AG0 citations50
US12241556B2Mar 4, 2025
Vacuum valve for providing a symmetrical fluid flow
VAT HOLDING AG0 citations48
US11906066B2Feb 20, 2024
Seal support ring for a valve
VAT HOLDING AG0 citations48
US12209687B2Jan 28, 2025
Closure device for closing an opening in a wall in a vacuum-tight manner
VAT HOLDING AG0 citations43
US9086172B2Jul 21, 2015
Vacuum valve
VAT HOLDING AG0 citations41
US10539253B2Jan 21, 2020
Vacuum valve
VAT HOLDING AG0 citations40
EHRNE FLORIAN
5 patentsUS8678344B2Mar 25, 2014
Mounting of a valve plate on a valve rod
EHRNE FLORIAN19 citations83
US8672293B2Mar 18, 2014
Vacuum valve
EHRNE FLORIAN10 citations83
US8424843B2Apr 23, 2013
Shuttle valve having two drives
EHRNE FLORIAN8 citations83
US8727311B2May 20, 2014
Vacuum valve with gas-tight shaft penetration
EHRNE FLORIAN4 citations72
US8215612B2Jul 10, 2012
Sliding valve
EHRNE FLORIAN4 citations61