Inventor
MATSUYAMA KENICHIROU
JP14 patents
⚠️ This page may combine multiple inventors who share the name “MATSUYAMA KENICHIROU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS9004788B2Apr 14, 2015
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD2 citations61
US12315752B2May 27, 2025
Substrate treatment apparatus and transfer schedule creation method
TOKYO ELECTRON LTD0 citations54
US11915959B2Feb 27, 2024
Substrate treatment apparatus and transfer schedule creation method
TOKYO ELECTRON LTD1 citations54
US12429782B2Sep 30, 2025
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations50
US11139189B2Oct 5, 2021
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations50
US10884337B2Jan 5, 2021
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations50
US12591180B2Mar 31, 2026
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations44
US12575366B2Mar 10, 2026
Substrate transfer method, substrate processing apparatus, and recording medium
TOKYO ELECTRON LTD0 citations42
US12543530B2Feb 3, 2026
Substrate transfer method, substrate processing apparatus, and recording medium
TOKYO ELECTRON LTD0 citations40
US9153467B2Oct 6, 2015
Substrate processing apparatus, substrate processing method and non-transitory computer-readable storage medium
TOKYO ELECTRON LTD0 citations39
MATSUYAMA KENICHIROU
3 patentsUS8560108B2Oct 15, 2013
Substrate processing apparatus and substrate processing method
MATSUYAMA KENICHIROU17 citations82
US8448600B2May 28, 2013
Substrate processing apparatus, substrate processing method, and storage medium
MATSUYAMA KENICHIROU5 citations70
US8588952B2Nov 19, 2013
Substrate processing system, substrate processing method and storage medium
MATSUYAMA KENICHIROU2 citations60